5.9 If we decrease the substrate doping concentration, how will the following parameters be affected? (Please indicate your answer by putting a mark, X, in the correct column.) Write down any relevant equation and explain briefly how you obtain the answer (a few words or one sentence). Assume the gate material is N'poly and the body is P type. Parameters A Accumulation region capacitance B Flat-band voltage, V C Depletion-region capacitance D Threshold voltage. V E Inversion region capacitance Increase Decrease Unchanged